Volatile nickel aminoalkoxide complex and deposition of...

Details Volatile nickel aminoalkoxide complex and deposition of... Volatile nickel aminoalkoxide complex and deposition of...

C - Chemistry, Metallurgy

07

F

C07F 15/04 (2006.01)

Patent

CA 2603749

A volatile nickel aminoalkoxide complex of formula (I) can form a nickel thin film having an improved quality by metal organic chemical vapor deposition (MOCVD).

La présente invention concerne un complexe d'aminoalcoxide de nickel volatil de formule (I) qui peut former un mince film de nickel ayant une qualité améliorée, par dépôt chimico-organique de métal en phase vapeur (metal organic chemical vapor deposition / MOCVD).

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