Wafer cassette transfer mechanism

Details Wafer cassette transfer mechanism Wafer cassette transfer mechanism

B - Operations, Transporting

65

G

356/195

B65G 65/00 (2006.01) H01L 21/677 (2006.01)

Patent

CA 1268265

ABSTRACT OF THE DISCLOSURE WAFER CASSETTE TRANSFER MECHANISM A wafer cassette transfer mechanism is disclosed which transfers a wafer cassette from a transfer arm to an elevator. The elevator moves vertically, up or down, so as to move the wafer cassette to a second transfer arm. The second transfer arm can then move the wafer cassette to after processing equipment.

535632

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