B - Operations – Transporting – 65 – G
Patent
B - Operations, Transporting
65
G
356/195
B65G 65/00 (2006.01) H01L 21/677 (2006.01)
Patent
CA 1268265
ABSTRACT OF THE DISCLOSURE WAFER CASSETTE TRANSFER MECHANISM A wafer cassette transfer mechanism is disclosed which transfers a wafer cassette from a transfer arm to an elevator. The elevator moves vertically, up or down, so as to move the wafer cassette to a second transfer arm. The second transfer arm can then move the wafer cassette to after processing equipment.
535632
Osler Hoskin & Harcourt Llp
Perkin-Elmer Corporation The
LandOfFree
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