Wafer flip apparatus

Details Wafer flip apparatus Wafer flip apparatus

H - Electricity

01

L

356/116, 356/194

H01L 21/00 (2006.01) H01L 21/683 (2006.01)

Patent

CA 1278879

WAFER FLIP APPARATUS ABSTRACT Apparatus is disclosed for automatically transferring a semiconductor wafer between a horizontal and a vertical plane, beginning and ending in precisely located positions. A wafer support arm is carried by a transfer member which also includes means for rotating the support arm between a "start" position and an intermediate position in a horizontal plane. Means are provided for rotating the transfer member to position the support arm in a vertical plane. The wafer support arm is then returned to its original position relative to the transfer means, thus establishing a "finish" position in the vertical plane.

558131

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