H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/194
H01L 21/00 (2006.01) H01L 21/68 (2006.01)
Patent
CA 1321661
ABSTRACT Method and apparatus are disclosed for pre- aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and O from a desire orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.
616010
Osler Hoskin & Harcourt Llp
Svg Lithography Systems Inc.
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