Wafer handling system

H - Electricity – 01 – L

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356/194

H01L 21/34 (2006.01) H01L 21/68 (2006.01)

Patent

CA 1285335

ABSTRACT Method and apparatus are disclosed for pre- aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orien- tation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

558132

LandOfFree

Say what you really think

Search LandOfFree.com for Canadian inventors and patents. Rate them and share your experience with other people.

Rating

Wafer handling system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer handling system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer handling system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFCA-PAI-O-1303185

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.