Wafer handling system

Details Wafer handling system Wafer handling system

H - Electricity

01

L

356/194

H01L 21/34 (2006.01) H01L 21/68 (2006.01)

Patent

CA 1285335

ABSTRACT Method and apparatus are disclosed for pre- aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orien- tation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

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