Wafer holder for semiconductor manufacturing apparatus and...

Details Wafer holder for semiconductor manufacturing apparatus and... Wafer holder for semiconductor manufacturing apparatus and...

H - Electricity

01

L

H01L 21/68 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2326575

A wafer holder is configured of a pair of ceramic base members and conductive layers each posed between the ceramic base members. The conductive layer has a body facing a wafer and an extraction extracted from the body for external connection, wherein the body and the extraction are arranged in a single plane. Thus there can be obtained a wafer holder for use with a semiconductor manufacturing apparatus that can reduce such distortion as caused when it is heated and cooled and that can also be readily manufactured.

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