Wafer probe with mounted amplifier

Details Wafer probe with mounted amplifier Wafer probe with mounted amplifier

G - Physics

01

R

356/117

G01R 1/067 (2006.01) G01R 31/28 (2006.01)

Patent

CA 1252221

Abstract A wafer probe comprises a support member hav- ing an end region which is shaped to permit the end region to be brought into close proximity with a component under test. An amplifier is mounted on the support member at its end region. A conductive probe element is attached to the amplifier and is electrically connected to the amplifiers input terminal. A transmission line is connected to the amplifier's output terminal for transmitting sig- nals from the amplifier to a measurement instru- ment.

526058

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