Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

B - Operations, Transporting

65

G

356/195

B65G 1/06 (2006.01) B66C 1/48 (2006.01) H01L 21/673 (2006.01)

Patent

CA 1227888

WAFER TRANSFER APPARATUS Abstract An automated system lifts a batch of semiconductor wafers from a slotted carrier, transfers them laterally and lowers them into a second slotted carrier. In doing this, jaws on the lifting apparatus open automatically to receive or release the wafers. With a carrier having relatively high slotted sides, such as the commonly used plastic cassette, a pusher engages the lower edge of the wafers exposed through the bottom of the cassette and pushes them upwardly sufficiently far to permit the lifter jaws to receive and lift the wafers. The apparatus is oriented at a slight angle to insure that the wafers are all arranged in precise, spaced, parallel relation so as to cooperate with slots in the lifter jaws and slots in the receiving carrier. The system has the capability to move two batches of 25 wafers to a quartz boat having 50 more-closely spaced slots, and similarly, two batches from a quartz boat may be transferred to two different plastic cassettes.

454909

Affiliated with

Also associated with

Rating

Wafer transfer apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transfer apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transfer apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1245332