Wafer transport device

Details Wafer transport device Wafer transport device

B - Operations, Transporting

65

G

B65G 49/00 (2006.01) H01L 21/677 (2006.01)

Patent

CA 2161800

An apparatus for transporting material, such as semiconductor wafers, between process modules (40, 44, 46) coupled to a chamber. The transport apparatus (10) includes a chamber (22), guide rails (24) affixed to an outer surface of the chamber; one or more material transporters (26) each including a motorized vehicle (80) positioned outside the chamber and movable along the guide rails, a material carrier (82) positioned inside the chamber, and magnetic levitation means (88, 90) for magnetically coupling the material carrier to the motorized vehicle through a nonmagnetic wall (66) of the chamber; and a controller (120) that controls the position of the motorized vehicle along the guide means to move the material carrier to desired positions within the chamber.

Affiliated with

Also associated with

Rating

Wafer transport device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transport device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transport device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1363254