Water window imaging x-ray microscope

G - Physics – 01 – N

Patent

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G01N 23/00 (2006.01) G03B 42/02 (2006.01) G21K 7/00 (2006.01)

Patent

CA 2060217

A high resolution x-ray microscope for imaging microscopic structures within biological specimens has an optical system including a highly polished primary and secondary mirror coated with identical multilayer coatings, the mirrors acting at normal incidence. The coating have a high reflectivity in the narrow wave bandpass between 23.3 and 43.7 angstroms and have low reflectivity outside of this range. The primary mirror has a spherical concave surface and the secondary mirror has a spherical convex surface. The radii of the mirrors are concentric about a common center of curvature on the optical axis of the microscope extending from the object focal plane to the image focal plane. The primary mirror has an annular configuration with a central aperture and the secondary mirror is positioned between the primary mirror and the center of curvature for reflecting radiation through the aperture to a detector. An x-ray filter is mounted at the stage end of the microscope, and film sensitive to x-rays in the desired band width is mounted in a camera at the image plane of the optical system. The microscope is mounted within a vacuum chamber for minimizing the absorption of x-rays in air from a source through the microscope.

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