Waveguide pair with cladding

Details Waveguide pair with cladding Waveguide pair with cladding

G - Physics

02

B

G02B 6/10 (2006.01) G02B 6/125 (2006.01) G02B 6/13 (2006.01) G02B 6/132 (2006.01) G02B 6/12 (2006.01)

Patent

CA 2239118

A planar waveguide structure has, supported on a lower refractive index buffer layer (5), a pair of optical cores (1, 2) that, over at least a portion of their length, are closely spaced. These cores are covered with a layer (6) of cladding material comprising boron and phosphorus doped silica glass deposited by PECVD as a succession of individually annealed layers in order to minimise the incidence of voids in the deposit between the cores.

Une structure plane de guide d'ondes comporte, en appui sur une couche tampon à faible indice de réfraction (5), deux noyaux optiques (1, 2), proches l'un de l'autre sur au moins une partie de leur longueur. Ces noyaux sont recouverts d'une couche (6) de matériau de placage, comprenant du verre de silice dopé au bore et au phosphore, déposée par dépôt chimique en phase vapeur activé par plasma sous la forme d'une succession de couches recuites individuellement afin de réduire à leur minimum les incidences des lacunes existant dans le dépôt entre les noyaux.

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