Wavelength spectroscopy device with integrated filters

Details Wavelength spectroscopy device with integrated filters Wavelength spectroscopy device with integrated filters

G - Physics

01

J

G01J 3/26 (2006.01) G02B 5/28 (2006.01) H01L 27/14 (2006.01) H01L 31/0232 (2006.01)

Patent

CA 2712636

The invention relates to a wavelength spectroscopy device that comprises, on a substrate SUB, a filtering module comprising two mirrors MIR1, MIR2 separated by a spacing membrane SP. The filtering module includes a plurality of interference filters FP1, FP2, FP3, the thickness of the spacing membrane SP being constant for a given filter and varying from one filter to the other.

L'invention concerne un dispositif de spectroscopie en longueur d'onde comportant sur un substrat SUB un module de filtrage constitué de deux miroirs MIR1, MIR2 séparés par une membrane d'espacement SP. Ce module de filtrage comporte une pluralité de filtres interférentiels FP1, FP2, FP3, l'épaisseur de la membrane d'espacement SP étant constante pour un filtre donné et variant d'un filtre à l'autre.

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