B - Operations – Transporting – 05 – C
Patent
B - Operations, Transporting
05
C
B05C 3/10 (2006.01) H01L 21/00 (2006.01) H01L 21/677 (2006.01)
Patent
CA 2209339
In an installation (20) for the wet chemical treatment of substrates (25) in a container (21) of treatment fluid (23), with a lifting device for inserting and removing at least one substrate holder (17) and the substrates, continuous lifting in and out is attained in that the lifting out device has a first transport slide for the substrates (25) and a second transport slide for the substrate holder (17).
L'invention concerne une installation (20) destinée au traitement chimique par voie humide de substrats (25) dans une cuve (21) contenant un fluide de traitement (23), qui comporte un dispositif élévateur servant à introduire et à ressortir au moins un porte-substrats (17) et les substrats concernés. Afin de parvenir à un processus d'introduction et d'extraction continu, par abaissement et élévation successifs, il est prévu que le dispositif d'élévation comporte un premier chariot de transport pour les substrats (25) et un second chariot de transport pour les porte-substrats (17).
Durst Johann
Schulz Werner
Sigel Holger
Robic
Steag Microtech Gmbh
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