Workpiece holder for processing apparatus, and processing...

Details Workpiece holder for processing apparatus, and processing... Workpiece holder for processing apparatus, and processing...

B - Operations, Transporting

23

Q

B23Q 3/15 (2006.01) H01L 21/68 (2006.01) H01L 21/683 (2006.01)

Patent

CA 2402089

An inexpensive workpiece holder having high reliability and a processing apparatus equipped with the workpiece holder are provided, in which damage caused by oxygen in the air is prevented. The holder comprises: a ceramic body which has an electrode and a heater circuit and which can holds a workpiece; a tubular member having an end portion connected to the ceramic body; a sealing member which is disposed inside the tubular member and which isolates a space inside the tubular member into two regions: a region on the first end portion ("sealed portion") and a region on the opposite side ("opposite region"); and power supply conductive members which extend from them opposite region side, penetrating the sealing member to the sealed region side, and which are electrically connected to the electrode and the heater circuit.

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