H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/68 (2006.01) H01L 21/687 (2006.01)
Patent
CA 2339359
The present invention provides an apparatus for supporting a workpiece in a precision processing system. The apparatus includes a plurality of workpiece contact elements for supporting the workpiece substantially in a plane, and a compliant stiction support for reducing workpiece vibration. The workpiece supporting apparatus can include a base member connected to the workpiece contact elements and to the compliant stiction support. The complaint stiction support can include a slider assembly for contacting the workpiece. The slider assembly is in sliding, frictional connection with the base member. The compliant stiction support can further include a workpiece contact spring element for forcing the slider assembly into contact with the workpiece. The compliant stiction support can further include a stiction spring element. The stiction spring element is in contact with the slider element. The stiction spring element forces the slider element into frictional contact with the base member. Thus, the compliant stiction support stiffly supports the workpiece against vibrational forces.
La présente invention concerne un appareil de support d'une pièce dans un système de traitement de précision. Cet appareil comprend plusieurs éléments de contact de pièce maintenant la pièce en question sensiblement dans un plan, et un support de friction flexible réduisant les vibrations de la pièce. L'appareil de support de la pièce peut comprendre un élément de base connecté à la fois aux éléments de contact de la pièce et au support de friction flexible, lequel support peut comprendre à son tour un ensemble coulissant venant en contact avec la pièce. L'ensemble coulissant est en relation de frottement et de coulissement avec l'élément de base. Le support de friction flexible peut également comprendre un ressort de contact avec la pièce pour amener l'ensemble coulissant en contact avec la pièce. Le support de friction flexible peur comprendre un élément ressort de friction. L'élément ressort de friction est en contact avec l'élément coulissant et il amène l'élément coulissant en contact de friction avec l'élément de base. Ainsi, le support de friction flexible soutient fortement la pièce contre les forces vibratoires.
Micrion Corporation
Riches Mckenzie & Herbert Llp
LandOfFree
Workpiece vibration damper does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Workpiece vibration damper, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Workpiece vibration damper will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1525994