X-ray-fluorescence measurement of thin film thicknesses

Details X-ray-fluorescence measurement of thin film thicknesses X-ray-fluorescence measurement of thin film thicknesses

G - Physics

01

N

358/6

G01N 23/223 (2006.01)

Patent

CA 1086870

X-RAY-FLUORESCENCE MEASUREMENT OF THIN FILM THICKNESSES Abstract of the Disclosure The thicknesses of the thin film components of a sample that comprises plural thin films deposited on top of each other on a substrate are simultaneously measured by an x-ray-fluorescence system. Incident x-rays excite x-ray fluorescence in the sample. Detection of the excited fluorescence is enhanced by a unique collimator assembly that is also adapted to enable direct monitoring of the intensity of the incident x-rays. - i -

277086

Affiliated with

Also associated with

Rating

X-ray-fluorescence measurement of thin film thicknesses does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with X-ray-fluorescence measurement of thin film thicknesses, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and X-ray-fluorescence measurement of thin film thicknesses will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-624808