X-ray lithography

Details X-ray lithography X-ray lithography

G - Physics

03

F

358/22, 314/43

G03F 7/20 (2006.01)

Patent

CA 1224839

X-Ray Lithography ABSTRACT Submicron x-ray lithography using a single shot of ultraviolet laser energy of one nanosecond (ns) duration and of relatively low energy to produce an x-ray pulse for exposing a resist to obtain a submicron pattern thereon. The incident x-ray flux used is about an order of magnitude smaller than heretofore required to obtain a comparable exposure with similar x-ray resists. A shield which transmits the x-ray pulse, but blocks the plasma material, is thermally coupled to the resist and heats the resist by transfer of the heat from the plasma thereto, upon exposure of the resist by the x-ray pulse.

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