X-ray mask structure and x-ray exposing method, and...

Details X-ray mask structure and x-ray exposing method, and... X-ray mask structure and x-ray exposing method, and...

G - Physics

03

F

G03F 1/14 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2082909

An X-ray mask structure comprises an X-ray absorber having a desired pattern, an X-ray permeable film supporting the X-ray absorber, and a supporting frame for supporting the X-ray permeable film. The X-ray mask structure has a metal oxide film formed on the portion of the X-ray permeable film having no X-ray absorber thereon.

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