G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 23/00 (2006.01) G01N 23/207 (2006.01) G21K 1/06 (2006.01)
Patent
CA 2397070
The complex, intended for carrying out the researches in the X-ray range at several analytical devices simultaneously, comprises the source (1) of the divergent X- rays, the channels of radiation transporting toward the analytical devices (5) and the apparatus of these devices for spectrometric, diffractometric and other resarches, image formation of the internal structure of the objects, X-ray lithography, etc. The radiation is transported toward the devices (5) as the quasi-parallel beams (4), formed by the X-ray "half' lenses (2), representing a package of the curved channels with the use of multiple total external reflection of the X- rays from their walls. Each of the "half' lenses captures a part (3) of the divergent radiation of the X-ray source (1). An X-ray tube is the preferable type of the source (1). The beams (35) of the radiation, being directed toward several analytical devices (5), can be obtained as well by means of the "half' lens (2), being common for these devices. The output beam (4) of the said "half" lens is split to several beams by means of the monochromators (33), placed on the path of the initial beam (4) at the angle to the direction of the said beam (4) propagation. The said monochromators (33) intercept the part (34) of the cross section of the initial beam. In a specific case the complex can include the "full" X-ray lens (6), focusing the source radiation on the region (22), located on the input of one of the analytical devices (8). The usage of the X-ray lenses provides for the X-rays users in the analytical devices the brightness, being not less than in the complexes, where the radiation source is a synchrotron or a synchrotron storage ring.
L'invention relève de la technique d'essai et de recherche de substances, matières ou instruments utilisant les rayons X. Le complexe de mesure et d'essai fonctionnant dans la gamme de rayons X sur plusieurs installations d'analyse à la fois comprend une source (1) du rayonnement X divergeant, des canaux de transport du rayonnement vers des installations (5) et des appareils pour ces installations destinés aux recherches de spectrométrie, diffractométrie et autres, à l'obtention des images de la structure interne des objets, de la lithographie à rayons X, etc. Le rayonnement est transporté vers les installations (5) en faisceaux quasi-parallèles (4) formés par des "semi-lentilles" à rayons X (2), qui se présentent comme un ensemble de canaux incurvés, en utilisant la réflexion multiple extérieure et complète de rayons X contre leurs parois. Les faisceaux de rayonnement (35), dirigés vers plusieurs installations analytiques (5), peuvent être également obtenus au moyen d'une "semi-lentille" (2) commune à ces installations, le faisceau de sortie (4) de cette "semi-lentille" étant divisé en plusieurs faisceaux au moyen de monochromateurs (33) placés sur le trajet du faisceau initial (4) sous un certain angle par rapport à sa direction de propagation, dont chacun intercepte un partie (34) de la section transversale du faisceau initial.
Bennett Jones Llp
Kumakhov Muradin Abubekirovich
LandOfFree
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