Zero bird-beak oxide isolation scheme for integrated circuits

Details Zero bird-beak oxide isolation scheme for integrated circuits Zero bird-beak oxide isolation scheme for integrated circuits

H - Electricity

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356/171

H01L 21/76 (2006.01) H01L 21/32 (2006.01) H01L 21/762 (2006.01)

Patent

CA 1294717

ZERO BIRD-BEAK OXIDE ISOLATION SCHEME FOR INTEGRATED CIRCUITS Roger Szeto ABSTRACT The present method provides for formation of isolation oxide without "bird-beak" extensions thereof through the use of a nitride mask in contact with the surface of a semiconductor substrate on both sides of a patterned oxide layer, on which substrate the isolation oxide is grown.

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