Zone melt recrystallization apparatus

Details Zone melt recrystallization apparatus Zone melt recrystallization apparatus

C - Chemistry, Metallurgy

30

B

327/4, 148/1.6

C30B 13/24 (2006.01) C30B 13/00 (2006.01) C30B 13/32 (2006.01) C30B 28/08 (2006.01) C30B 31/12 (2006.01) H01L 21/00 (2006.01) H01L 21/02 (2006.01) H01L 21/322 (2006.01)

Patent

CA 1337169

The improved zone-melt recrystallization apparatus is comprised of a port system for providing a thermal barrier between the recrystallization chamber and the loader assembly. A bellows system is used to lift a plurality of pins that support a silicon wafer being recrystallized. Flexure supports are designed to constrain the motion of the pins within the desired direction of motion of the wafer.

582973

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