Zone-melting recrystallization process

Details Zone-melting recrystallization process Zone-melting recrystallization process

H - Electricity

01

L

356/178, 327/4,

H01L 21/20 (2006.01) C30B 13/00 (2006.01) C30B 28/08 (2006.01)

Patent

CA 1337168

An improved method of zone-melting and recrystallizing of polysilicon film on an insulator over silicon is described.

582965

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