Zone refiner automatic control

Details Zone refiner automatic control Zone refiner automatic control

C - Chemistry, Metallurgy

30

B

148/1.9

C30B 13/00 (2006.01) C30B 13/30 (2006.01)

Patent

CA 1070222

ZONE REFINER AUTOMATIC CONTROL ABSTRACT OF THE DISCLOSURE Disclosed is a method and apparatus for the automated growing of a floating zone refined, monocrystalline semiconductor rod, Two images of the molten/solid interface are separately positioned on two sensor arrays which, in addition to providing positioning feedback information, measure the diameter, the length of the molten zone and the "bag" or overhang angle of the molten semiconductor matter. The output of the sensor arrays are processed into signals which operate the zone refiner controls. There is thus provided an automated process for zone refining and monocrystalline rod growth of a semiconductor crystal from a seed crystal beginning with the tapering-out process, through the straight rod growth with a closely controlled diameter portion, to the end of the tapering-in process.

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