Vibration measuring and the apparatus therefor

H - Electricity – 01 – L

Patent

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349/35, 349/65

H01L 41/193 (2006.01) B06B 1/06 (2006.01) G01H 1/00 (2006.01) G01H 11/08 (2006.01)

Patent

CA 1013462

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