Method of manufacturing oxidizing agent and method of...

C - Chemistry – Metallurgy – 08 – G

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C08G 65/32 (2006.01) C07C 51/16 (2006.01) C08G 65/324 (2006.01) C23C 22/68 (2006.01)

Patent

CA 1100303

ABSTRACT OF THE DISCLOSURE A method of manufacturing an oxidizing agent comprises the step of oxidizing polyoxyalkylene having an average molecular weight of 1,000 to 30,000 and being represented by the following general formula: ? R - O ?n where R stands for alkylene group represented by (CH2)m where m = 2 or 3. A solution such as an aqueous solution containing polyoxyalkylene of more than 1% by weight, or a melted polyoxyalkylene is treated by supplying an oxidizing gas thereinto to oxidize and decompose the polyoxyalkylene into the oxidizing agent. A method of oxidation by the use of the oxidizing agent manufactured by the above-described method is applied to, for example, a surface treatment of semiconductor or metal.

314918

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