Resonator force transducer

G - Physics – 01 – L

Patent

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G01L 1/10 (2006.01) G01L 1/16 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 1167664

Abstract of the Disclosure A vibratory, force transducer (4) includes a pair of elongate, generally parallel bars (8, 12) coupled toge- ther at their ends (16, 20) in a type of double-ended tuning fork arrangement. The bars (8, 12) each have a thickness of t, a width of w, and a length between fixed ends of L. The distance separating the points where the bars (8, 12) are coupled together is m. Apparatus (32, 26, 40) is provided to cause the bars (8, 12) to vibrate in a transverse direc- tion and in substantially 180° phase opposition. Apparatus (44) is also provided for determining the frequency of vibration of the bars (8, 12) so that when the bars (8, 12) are subjected to either compressive or tensile forces along the longitudinal axis of the bars (8, 12), the magnitude of such forces can be readily determined by simply determining the magnitude of the frequency change. The values of w and t are selected so that 0.4 t/w 4, and this reduces the likelihood of buckling the transducer (4) when it is sub- jected to compressive forces while also maintaining a con- figuration which is relatively easy to fabricate using a photolithographic process. The values of t, w, L, and m are selected so that various spurious modes of oscillation of the transducer (4), which causes a reduction in the mechani- cal Q and thus an erroneous reading of applied forces, are avoided. The disclosed selection processes for t, w, and L may be applied also to single beam (60) flexure mode trans- ducers to avoid spurious modes of oscillation while main- taining a configuration which is relatively easy to fabri- cate using photolitographic processes.

387790

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