Secondary electron detector for use in a gaseous atmosphere

Details Secondary electron detector for use in a gaseous atmosphere Secondary electron detector for use in a gaseous atmosphere

Category

H - Electricity

Subcategory

01

Subsubcategory

J

CPC

358/10

IPC codes

H01J 37/252 (2006.01) H01J 37/244 (2006.01)

Type

Patent

Patent number

CA 1293337

Description

SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE ABSTRACT OF THE DISCLOSURE The invention provides for a device for generating, amplifying and detecting secondary electrons from a surface of a sample. The device may comprise a scanning electron microscope. The invention also provides for a method for generating, amplifying and detecting second- ary electrons from a surface of a sample.

Application Number

567347

Affiliated with

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