Aqueous chemical suspension for pyrolytic deposition of...

C - Chemistry – Metallurgy – 23 – C

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C23C 18/08 (2006.01) C03C 17/25 (2006.01) C23C 18/12 (2006.01)

Patent

CA 1217097

Abstract of the Disclosure A method is disclosed for depositing metal containing films using relatively water-insoluble coating reactants by dispersing said coating reactants in ultrafine powder form into an aqueous medium containing a wetting agent to form an aqueous chemical suspension.

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