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G01L 9/06 (2006.01) G01L 9/00 (2006.01)
Patent
CA 1320847
Patent Case No. I1104362-U.S. APPLICATION FOR AN ABSOLUTE PRESSURE TRANSDUCER AND METHOD FOR MAKING SAME MILTON W. MATHIAS AND DOUGLAS W. WILDA ABSTRACT An absolute pressure transducer includes a hollow glass tube supporting across one end thereof a differential pressure responsive semiconductor plate having piezoresistive elements diffused therein and an evacuated sealed chamber within the tube exposed to the plate. A method for making the transducer and providing the evacuated chamber within the tube adjacent to the plate includes the steps of mounting the plate across the end of the tube to form a first fluid-tight seal therewith, inserting a loose glass plug within the tube to define the chamber, exposing the interior of the tube to a vacuum, concurrently heating the tube in the vicinity of the plug to allow the heated tube wall to constrict around the plug in response to the internal vacuum and to fuse with the plug to form a second fluid-tight seal therewith and allowing the tube and plug to cool to trap the vacuum in the chamber. A pressure transmitter uses the transducer with electrical connections to the piezoresistive elements in a fluid filled system for applying an external pressure to the plate to produce an output signal from the elements representative of the differential pressure between the evacuated chamber and the external pressure.
596746
Mathias Milton W.
Wilda Douglas W.
Honeywell Inc.
Smart & Biggar
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