Ebulliometric hot spot detector

G - Physics – 01 – N

Patent

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Details

73/123, 340/154,

G01N 25/72 (2006.01) G01N 25/08 (2006.01) G01R 31/28 (2006.01)

Patent

CA 1186526

EBULLIOMETRIC HOT SPOT DETECTOR ABSTRACT An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature.

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