Thin film peeling apparatus

Details Thin film peeling apparatus Thin film peeling apparatus

B - Operations, Transporting

29

C

26/127, 95/94.4

B29C 63/00 (2006.01) B26F 3/00 (2006.01) G03F 7/16 (2006.01)

Patent

CA 1311642

ABSTRACT OF THE DISCLOSURE A thin film peeling apparatus in which a portion of a thin film adhered to a base plate is initially lifted and subsequently peeled therefrom. The film peeling apparatus includes a conveying device for conveying the base plate along a base plate conveyance path, a fir t thin film conveyance device for conveying the lifted portion of the thin film and a second thin film conveyance device for subsequently conveying the thin film. The first thin film conveyance device is disposed so that the thin film is peeled in a direction substantially perpendicular to the direction of conveyance of the base plate. The second thin film conveyance device includes at least one fluid ejector for ejecting fluid against the thin film such that the thin film is conveyed in a direction parallel to the surface of the base plate and substantially perpendicular to the direction of conveyance of the base plate.

597733

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