Metal oxide patterns with planar surface

Details Metal oxide patterns with planar surface Metal oxide patterns with planar surface

G - Physics

11

B

26/124, 96/266,

G11B 5/31 (2006.01) H01F 41/34 (2006.01)

Patent

CA 1193479

ABSTRACT OF THE DISCLOSURE The subject invention relates to the fabrication of metal oxide patterns on a substrate adapted for use with thin film magnetic heads. The metal oxide pattern has a precisely defined geometry including nearly vertical side walls, for minimizing read/write errors. In addition, a filler material formed from a non-magnetic, non-metallic compound is provided on the substrate in a pattern complimentary to the metal oxide pattern. In accordance with the subject invention, the top surface of the metal oxide pattern and the filler material are co-planar. By this arrangement, subsequent layers may be uniformly deposited without discontinuities. The subject method includes a plurality of distinct masking and etching steps in order to achieve the desired result.

425627

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