Positioning device comprising pre-stressed contactless bearings

Details Positioning device comprising pre-stressed contactless bearings Positioning device comprising pre-stressed contactless bearings

G - Physics

05

B

308/1, 269/31

G05B 1/06 (2006.01) B23Q 1/38 (2006.01) B23Q 1/48 (2006.01) F16C 32/06 (2006.01) G01B 5/00 (2006.01) H01L 21/68 (2006.01)

Patent

CA 1253527

- 16 - ABSTRACT: "A positioning device having pre-stressed contactless bearings." A Positioning device having a plate-shaped carrier (5) which is slidably supported on a table (1) and is displaceable in a horizontal plane and on which a pressure force and a tensile force, respectively, are exerted by means of at least two translatory drives (11, 13). The translatory drives (11, 13) are coupled to the carrier (5) by means of horizontallyoperating static thrust and tensile bear- ings, respectively (33 to 41, 49) which via a viscous medium transmit pressure and tensile forces, respectively between the carrier (5) and the translator drives (11, 13) in a contactless manner. The contact- less bearings (33 to 41, 49) are pre-stressed with a force which is larger than the maximum tensile force occurring between the drives (11, 13) and the carrier (5). Thus a substantially frictionless coupling is obtained between the drives (11, 13) and the carrier (5). This coupling acts at the same time as a guide for the carrier (5).

505475

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