Method of coating ceramics and quartz crucibles with...

Details Method of coating ceramics and quartz crucibles with... Method of coating ceramics and quartz crucibles with...

C - Chemistry, Metallurgy

23

C

204/178, 204/96.

C23C 14/18 (2006.01) C04B 41/45 (2006.01) C04B 41/81 (2006.01) C23C 4/12 (2006.01) C23C 14/22 (2006.01) C23C 14/32 (2006.01) H05K 1/03 (2006.01) H05K 3/38 (2006.01)

Patent

CA 1238295

ABSTRACT OF THE DISCLOSURE Quartz crucibles for the melting of silicon and ceramic substrates are coated with protective materials or metals at least in part evaporated from an electrode with which an arc is struck at low voltage and current to deposit material from the electrode on the substrate in a vacuum chamber. The electrode may be heated and the substrate may be sandblasted and preheated.

476016

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