Directional accelerometer and its microlithographic...

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G01P 15/08 (2006.01) B81B 3/00 (2006.01) G01P 15/125 (2006.01)

Patent

CA 1251338

-24- ABSTRACT OF THE DISCLOSURE Directional accelerometer and its micro- lithographic fabrication process. This accelerometer comprises a substrate having at least one recess defining at least one beam in the substrate, whereof one of the ends is integral with the remainder of the substrate, the beam, which is oriented in a first direction, being deformable into said recess in a single direction, called the second direction, parallel to the substrate surface and perpendicular to the first direction, said second direction corresponding to the acceleration component to be measured, as well as electrical connections and contacts formed in the substrate and used for connecting means for measuring the deformations of said beam, these measurements making it possible to determine said acceleration components.

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