Production of semiconductor devices

Details Production of semiconductor devices Production of semiconductor devices

H - Electricity

01

L

356/172

H01L 21/38 (2006.01) G02F 1/025 (2006.01) H01L 21/027 (2006.01) H01L 21/263 (2006.01) H01L 21/28 (2006.01)

Patent

CA 1224887

ABSTRACT PRODUCTION OF SEMICONDUCTOR DEVICES A process is disclosed in which a layer of an organic material having a window is deposited onto the surface of an initial semiconductor structure. Layers are deposited on the exposed surface of the semiconductor, of which one layer is an ion-beam resisting material. Corresponding layers are deposited on the organic material. The organic material is then lifted off together with the layers deposited thereon. Ion-beam milling of the semi- conductor material to either side of the layer of ion beam resisting material followed by removal of any remnant thereof results in a structure having an elevated semi- conductor portion carrying an electrode. The invention can be applied to the production of rib waveguide electrooptic devices, including phase modulators.

482094

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