Method of making heteroepitaxial ridge overgrown laser

Details Method of making heteroepitaxial ridge overgrown laser Method of making heteroepitaxial ridge overgrown laser

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H01S 5/22 (2006.01) H01S 3/063 (2006.01) H01S 5/12 (2006.01) H01S 5/223 (2006.01) H01S 5/327 (2006.01) H01L 33/00 (2006.01)

Patent

CA 1213344

- 15 - METHOD OF MAKING HETEROEPITAXIAL RIDGE OVERGROWN LASER Abstract A method of making a ridge waveguide laser with the ridge being grown through a stripe opened in an oxide layer covering one of the cladding layers is described. In one embodiment, the cladding layer is corrugated and the ridge waveguide laser is a distributed feedback laser.

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