Reflectometric method of measurement and apparatus for...

G - Physics – 01 – N

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73/58, 73/0.5

G01N 21/55 (2006.01) G01N 21/47 (2006.01) G01N 21/57 (2006.01) G01J 1/24 (2006.01)

Patent

CA 1299386

17 (57) ABSTRACT A reflectometric method of measurement for a 2- channel reflectometer, wherein in connection with the calibration, the standard sample is placed in the measuring channel (4), the dimming of the measuring channel is set to a random position and the light intensities detected both in the measuring channel and the reference channel (14) are adjusted into balance by adjusting the dimming of the reference channel by aid of the measuring diaphragm (17), and the measuring of the sample is carried out by setting the intensities into balance, likewise by aid of the measuring diaphragm of the reference channel. The reflectance value of the sample under measurement is calculated from the reflectance value of the standard, by aid of the set value of the measuring diaphragm obtained in the measurement and on the basis of the set value of the measuring diaphragm obtained in the calibration measurement.

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