Multilayer ceramic coatings from metal oxides and hydrogen...

Details Multilayer ceramic coatings from metal oxides and hydrogen... Multilayer ceramic coatings from metal oxides and hydrogen...

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B05D 3/02 (2006.01) H01L 21/314 (2006.01) H01L 21/56 (2006.01)

Patent

CA 1323529

MULTILAYER CERAMIC COATINGS FROM METAL OXIDES AND HYDROGEN SILSESQUIOXANE RESIN CERAMIFIED IN AMMONIA ABSTRACT Mixtures of hydrogen silsesquioxane resin and metal oxide precursors such as acyloxy and alkoxy compounds of aluminum, zirconium and titanium can be coated on substrates and subsequently ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a nitrided ceramic coating on the surface of the substrate. The nitrided coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided coating with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.

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