Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

G - Physics

01

L

26/104, 73/3

G01L 9/12 (2006.01) H01G 5/00 (2006.01)

Patent

CA 1178078

ABSTRACT A capacitive pressure sensor including a con- cave base member coupled to a central base support. The base member has a flange extending from its rim having a substantially planar surface. A conductive, deformable diaphragm is stretched across the flange and held by a clamping ring having a surface complementary to the flange. A substantially planar electrode is positioned substantially parallel to and displaced by a predeter- mined distance from the diaphragm by an electrode sup- port member coupled to the central base support.

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