Purification of chlorosilanes

Details Purification of chlorosilanes Purification of chlorosilanes

C - Chemistry, Metallurgy

01

B

23/179

C01B 33/107 (2006.01)

Patent

CA 1207127

PURIFICATION OF CHLOROSILANES ABSTRACT Chlorosilanes contaminated with boron- containing impurities can be purified by passing the chlorosilane vapor through a silica fixed bed. Normally the boron level in trichlorosilane is reduced by about 90-99+ % by the use of this process. The capacities of the silica columns for the purification of trichloro- silane generally are in the range of 1500-2000 pounds trichlorosilane per pound of silica. The purified chlorosilane is particularly well suited for the production of polycrystalline silicon. Polycrystalline silicon containing 0.03 ppba (parts per billion atomic) has been prepared from trichlorosilane purified with this process.

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