Silane purification process

Details Silane purification process Silane purification process

C - Chemistry, Metallurgy

01

B

23/196, 150/20

C01B 33/04 (2006.01)

Patent

CA 1224013

ABSTRACT A process for the removal of and analysis of phosphine and arsine impurities in silane gas. Silane gas which normally contains the impurities of AsH3 and PH3 is contacted with a solution of NaAlH4 in dimeth- oxyethane to remove the impurities therefrom. The dimeth- oxyethane or other ether solution may then be hydrolyzed with water or alcohol to evolve hydrogen gas from the NaAlH4 and to re-evolve phosphine and arsine which may then be quantitatively determined by gas chromatography, atomic absorption, or other means.

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