Method of fabricating solar cells

Details Method of fabricating solar cells Method of fabricating solar cells

H - Electricity

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H01L 25/00 (2006.01) H01L 21/288 (2006.01) H01L 21/318 (2006.01) H01L 31/0216 (2006.01) H01L 31/18 (2006.01)

Patent

CA 1238480

ABSTRACT A solar cell fabrication procedure is described which is characterized by (1) formation of a "polysilazane" coating on a silicon substrate, photo-lithography of the polysilazane coating to form a plating mask pattern, (3) a heating step which re- moves residual photoresist and converts the polysila- zane coating to a denser form of silicon nitride having a reduced etch rate, and (4) use of densified silicon nitride as a mask for the plating of electrode metal and also as an anti-reflection coating.

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