Corrosion-resistant and heat-resistant aluminum-based alloy...

C - Chemistry – Metallurgy – 23 – C

Patent

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117/225, 204/96.

C23C 14/06 (2006.01) C22C 21/00 (2006.01) C22C 45/08 (2006.01) C23C 14/14 (2006.01)

Patent

CA 1324928

CORROSION-RESISTANT AND HEAT-RESISTANT ALUMINUM-BASED ALLOY THIN FILM AND PROCESS FOR PRODUCING THE SAME ABSTRACT OF THE DISCLOSURE The present invention provides a corrosion- resistant and heat-resistant aluminum-based alloy thin film consisting of a composite having a composition represented by the general formula , AlaNibXcNd, wherein: X is a metal element selected from Y and Zr and a, b, c and d are as follows, in atomic percentages: 70 ? a ? 93, 0.5 ? b ? 7.5, 0.5 ? c ? 12 and 1 ? d ? 18, the composite being at least 50% (by volume) composed of an amorphous phase. The thin films are produced by depositing a material having the composition represented by the above-defined general formula onto a substrate by a thin film formation technique, such as sputtering, vacuum deposition or ion plating. In the production process, only nitrogen may be supplied as gas. The novel aluminum-based alloy thin film has superior corrosion-resistance and heat- resistance together with high levels of hardness and wear resistance. Further, the thin films can be subjected to a high degree of bending.

606247

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