Apparatus for removing minute particles from a substrate

Details Apparatus for removing minute particles from a substrate Apparatus for removing minute particles from a substrate

B - Operations, Transporting

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B24C 1/00 (2006.01) B01F 3/06 (2006.01) B01F 5/06 (2006.01) B08B 3/02 (2006.01) B24C 3/32 (2006.01) C01B 31/22 (2006.01) H01L 21/00 (2006.01)

Patent

CA 1310188

ABSTRACT APPARATUS AND METHOD FOR REMOVING MINUTE PARTICLES FROM A SUBSTRATE Apparatus for removing small particles from a sub- strate comprising a source of fluid carbon dioxide, a first means for expanding a portion of the fluid carbon dioxide into a first mixture containing gaseous carbon dioxide and fine droplets of liquid carbon dioxide, coalescing means for converting the first mixture into a second mixture containing gaseous carbon dioxide and larger liquid droplets of carbon dioxide, second expansion means for converting said second mixture into a third mixture containing solid particles of carbon dioxide and gaseous carbon dioxide, and means for directing said third mixture toward the substrate. Also disclosed are methods for removing fine particles from substrates utilizing the subject apparatus.

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