Process for self-healing dielectric

Details Process for self-healing dielectric Process for self-healing dielectric

H - Electricity

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H01L 21/326 (2006.01) H01L 21/3105 (2006.01) H01L 21/314 (2006.01) H01L 21/316 (2006.01) H01L 21/318 (2006.01) H01L 27/04 (2006.01)

Patent

CA 1187623

PROCESS FOR SELF-HEALING DIELECTRICS Andrew C. Tickle ABSTRACT OF THE INVENTION Defects in dielectric layers exhibiting low dielectric strength on silicon substrates (11) are deliberately damaged during manufacture to allow their repair by the formation of dielectric plugs (13B). The defects are damaged by the application of an electric field, and are repaired by the selective oxidation or nitridation of the silicon substrate underlying the damaged areas of dielectrics.

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