Trace metals analysis in semiconductor material

Details Trace metals analysis in semiconductor material Trace metals analysis in semiconductor material

G - Physics

01

N

73/97

G01N 1/28 (2006.01) C30B 13/00 (2006.01) G01N 1/40 (2006.01) G01N 33/00 (2006.01)

Patent

CA 1319278

TRACE METALS ANALYSIS IN SEMICONDUCTOR MATERIAL ABSTRACT A method for analyzing and quantifying the individual trace metals content of a semiconductor material in the low to sub-parts per billion (ppba) range. The method comprises (A) float-zone refining of a sample of the semiconductor material creating a melt zone containing essentially all the trace metals of the sample; (B) cooling the melt zone to form a solid zone concentrated in trace metals; (C) separating the solid zone concentrated in trace metals from the sample of the semiconductor material; (D) converting the solid zone concentrated in trace metals into a form suitable for trace metals analysis; (E) analyzing the solid zone with known trace metals analytical techniques; and (F) calculating total trace metals from these analytical results. This method can also be applied to the small tip which forms on the side of the solid zone.

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