Surface treatment of a molybdenum screening mask

Details Surface treatment of a molybdenum screening mask Surface treatment of a molybdenum screening mask

C - Chemistry, Metallurgy

23

C

117/157, 117/85,

C23C 16/34 (2006.01) B05D 3/06 (2006.01) C23C 16/02 (2006.01) C23C 16/50 (2006.01) C23C 28/00 (2006.01)

Patent

CA 1260334

FI9-84-044 SURFACE TREATMENT OF A MOLYBDENUM SCREENING MASK Abstract Disclosed is a method of treating the surface of a molybdenum mask used for screening a metallized paste pattern to render it smooth and preserve the mask's hardness. The treatment consists of subjecting the mask to a nitridation step by which an ultrathin layer of molybdenum layer is first formed, followed by deposition of a comparatively thick silicon nitride layer thereon. The nitridation step may be accom- plished in a plasma deposition system using either forming gas, ammonia or gas mixture of nitrogen and ammonia at a predetermined low temperature and pressure. The silicon nitride deposition may be accomplished in the same system at the same tempera- ture and pressure by substituting the gas utilized to form the molybdenum nitride with a gaseous mixture of silane and one of nitrogen and ammonia.

500419

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