Preparation of superconducting oxide films using a...

Details Preparation of superconducting oxide films using a... Preparation of superconducting oxide films using a...

H - Electricity

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117/103, 117/114

H01L 39/24 (2006.01) C04B 35/45 (2006.01) C04B 35/64 (2006.01) C23C 14/08 (2006.01) C23C 14/58 (2006.01) C23C 14/00 (2006.01)

Patent

CA 1332327

- 31 - Abstract of the Disclosure This invention is directed to a method of preparing a superconducting metal oxide film on a substrate. More particularly, the method comprises depositing a superconducting metal oxide precursor film on the substrate and then subjecting it to annealing in a nitrogen atmosphere followed by annealing in an oxygen atmosphere, followed by rapid cooling, according to schedule wherein the time and temperature are critically defined.

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