Cryogenic process for metal lift off

Details Cryogenic process for metal lift off Cryogenic process for metal lift off

G - Physics

03

F

117/100, 117/64,

G03F 7/36 (2006.01) G03F 7/40 (2006.01) H01L 21/027 (2006.01) H05K 3/14 (2006.01)

Patent

CA 1332323

-20- Abstract of the Disclosure This invention is directed to a process for the cryogenic lift-off of metal/resist material from a surface of a substrate.

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